Measurements of the mechanical behaviour of micromachined silicon and silicon-nitride membranes for microphones, pressure sensors and gas flow meters
- 1 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 41 (1-3) , 287-292
- https://doi.org/10.1016/0924-4247(94)80125-8
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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