A subminiature capacitive movement detector using a composite membrane suspension
- 1 March 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 31 (1-3) , 90-96
- https://doi.org/10.1016/0924-4247(92)80085-h
Abstract
No abstract availableKeywords
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- Mechanical property measurements of thin films using load-deflection of composite rectangular membranesSensors and Actuators, 1989
- A measurement of intrinsic SiO2 film stress resulting from low temperature thermal oxidation of SiJournal of Vacuum Science & Technology B, 1986