Errors associated with the design, calibration and application of piezoresistive stress sensors in (100) silicon
- 1 January 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B
- Vol. 17 (1) , 97-107
- https://doi.org/10.1109/96.296437
Abstract
No abstract availableKeywords
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