Molecular dynamics simulation of non-equilibrium low energy (1–100 eV) ion beam deposition processes
- 1 June 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 91 (1-4) , 593-596
- https://doi.org/10.1016/0168-583x(94)96293-6
Abstract
No abstract availableKeywords
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Si Ge Si (100)Materials Science and Engineering: B, 1992 - Molecular-dynamics simulation of the energetic deposition of Ag thin filmsPhysical Review B, 1991