Integrated circuit compatible electrostatic polysilicon microrelays
- 1 June 1995
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 5 (2) , 156-160
- https://doi.org/10.1088/0960-1317/5/2/026
Abstract
A low-power IC-compatible electrostatically driven microrelay is presented. The mechanical part of the microrelay consists of a polysilicon/silicon nitride/polysilicon microbridge realized by sacrificial layer technology. Its fabrication, operation up to 100 kHz and net switching voltages in the 1 to 10 V range are reported.Keywords
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