New Precursors for Chemical Vapor Deposition of Iridium
- 15 August 1998
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 10 (9) , 2329-2331
- https://doi.org/10.1021/cm980346x
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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