Al-Si crystallographic-orientation transition in Al-Si/TiN layered structures and electromigration performance as interconnects
- 15 January 1995
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 77 (2) , 885-892
- https://doi.org/10.1063/1.359014
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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