Simple Monte-Carlo computer procedure for the sputtering and depth parameter determination of implanted ions in amorphous targets
- 1 October 1985
- journal article
- Published by Elsevier in Surface Science
- Vol. 161 (1) , 101-114
- https://doi.org/10.1016/0039-6028(85)90730-7
Abstract
No abstract availableKeywords
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