X-Ray Diffraction Analysis of Strains and Stresses in Thin Films
- 1 January 1988
- book chapter
- Published by Elsevier
Abstract
No abstract availableThis publication has 63 references indexed in Scilit:
- GaAs, AlAs, and AlxGa1−xAs: Material parameters for use in research and device applicationsJournal of Applied Physics, 1985
- Observations of stresses in thin films of palladium and platinum silicides on siliconJournal of Vacuum Science and Technology, 1980
- X-ray double-crystal diffractometry of Ga1−xAlxAs epitaxial layersJournal of Crystal Growth, 1978
- Measurement of stresses in thin films on single crystalline substratesPhysica Status Solidi (a), 1978
- X-ray diffraction topographs of silicon crystals with superposed oxide film. III. Intensity distributionJournal of Applied Physics, 1973
- Calculated elastic constants for stress problems associated with semiconductor devicesJournal of Applied Physics, 1973
- X-ray Pendellösung fringes in Darwin reflectionActa Crystallographica Section A, 1968
- Enhanced X-Ray Diffraction from Substrate Crystals Containing Discontinuous Surface FilmsJournal of Applied Physics, 1967
- Anomalies in the Elastic Constants and Thermal Expansion of Chromium Single CrystalsPhysical Review B, 1963
- Elastic Constants of Single Crystals of the bcc Transition Elements V, Nb, and TaJournal of Applied Physics, 1961