Nitrogen impurity incorporation behavior in a chimney HTCVD process: pressure and temperature dependence
- 30 July 1999
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 61-62, 151-154
- https://doi.org/10.1016/s0921-5107(98)00490-5
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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