CMOS-integrated high-speed MSM germanium waveguide photodetector
Top Cited Papers
- 25 February 2010
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 18 (5) , 4986-4999
- https://doi.org/10.1364/oe.18.004986
Abstract
A compact waveguide-integrated Germanium-on-insulator (GOI) photodetector with 10 ± 2fF capacitance and operating at 40Gbps is demonstrated. Monolithic integration of thin single-crystalline Ge into front-end CMOS stack was achieved by rapid melt growth during source-drain implant activation anneal.Keywords
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