High-quality single-crystal Ge stripes on quartz substrate by rapid-melting-growth
- 13 July 2009
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 95 (2) , 022115
- https://doi.org/10.1063/1.3182795
Abstract
Single-crystal Ge on a transparent insulating substrate is desired to achieve advanced thin-film transistors (TFTs) with high speed operation. We have developed the rapid-melting-growth process of amorphous Ge by using polycrystalline Si islands as the growth seed. High-quality and dominantly (100)-oriented single-crystal Ge stripes with length are demonstrated on quartz substrates. The temperature dependence of the electrical conductivity shows a high hole mobility of . This method opens up a possibility of Ge-channel TFT with the high carrier mobility.
Keywords
This publication has 20 references indexed in Scilit:
- Acceptorlike Behavior of Defects in SiGe Alloys Grown by Molecular Beam EpitaxyJapanese Journal of Applied Physics, 2008
- Thin-body Ge-on-insulator p-channel MOSFETs with Pt germanide metal source/drainThin Solid Films, 2006
- Ge diffusion and solid phase epitaxy growth to form Si1−xGex/Si and Ge on insulator structureThin Solid Films, 2006
- Fabrication Aspects of Germanium on Insulator from Sputtered Ge on Si-SubstratesElectrochemical and Solid-State Letters, 2006
- Electrical properties for poly-Ge films fabricated by pulsed laser annealingThin Solid Films, 2005
- Strained Si, SiGe, and Ge on-insulator: review of wafer bonding fabrication techniquesSolid-State Electronics, 2004
- Polycrystalline Germanium and Silicon-Germanium Alloys on Plastic for Realization of Thin-Film TransistorsMRS Proceedings, 2004
- Poly-Si TFTs From Glass to Plastic Substrates: Process and Manufacturing ChallengesMRS Proceedings, 2004
- High hole mobility in strained Ge channel of modulation-doped p-Si0.5Ge0.5/Ge/Si1−xGex heterostructureJournal of Crystal Growth, 1991
- Resistivity, mobility and impurity levels in GaAs, Ge, and Si at 300°KSolid-State Electronics, 1968