Bonding and Assembling Methods for Realising a µTAS

This publication has 15 references indexed in Scilit:

• Integrated flow-regulated silicon micropump
  Sensors and Actuators A: Physical, 1994
• LIGA micropump for gases and liquids
  Sensors and Actuators A: Physical, 1994
• A silicon microvalve with combined electromagnetic/electrostatic actuation
  Sensors and Actuators A: Physical, 1993
• Micro flow cell for blood gas analysis realizing very small sample volume
  Sensors and Actuators B: Chemical, 1992
• Integrated micro flow control systems
  Sensors and Actuators A: Physical, 1990
• Micropump and sample-injector for integrated chemical analyzing systems
  Sensors and Actuators A: Physical, 1990
• Piezoelectric micropump with three valves working peristaltically
  Sensors and Actuators A: Physical, 1990
• A piezoelectric micropump based on micromachining of silicon
  Sensors and Actuators, 1988
• Micromachining for Chemical Sensors
  Published by Elsevier ,1988
• A gas chromatographic air analyzer fabricated on a silicon wafer
  IEEE Transactions on Electron Devices, 1979