Highly Oriented Yba2Cu3O7-X Thin Films Prepared by Unbalanced Dc Magnetron Sputtering From a Single Stoichiometric Target
- 1 January 1989
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Microstructure and properties of superconducting sputter deposited Y–Ba–Cu–O filmsJournal of Materials Research, 1989
- Preparation of YBaCuO films by DC magnetron sputteringSuperconductor Science and Technology, 1989
- Single target sputtering of superconducting YBa2Cu3O7−δ thin films on Si (100)Applied Physics Letters, 1989
- Ion-assisted deposition and metastable structuresThin Solid Films, 1988
- Epitaxial Y-Ba-Cu-O thin films prepared by rf-magnetron sputteringJournal of Applied Physics, 1988
- Preparation of Y–Ba–Cu–O Films by dc SputteringJapanese Journal of Applied Physics, 1988
- I n s i t u preparation of Y-Ba-Cu-O superconducting thin films by magnetron sputteringApplied Physics Letters, 1988
- Superconductivity and resputtering effects in rf sputtered YBa2Cu3O7−x thin filmsApplied Physics Letters, 1987
- High T c superconducting B1 phase MoN films prepared by low-energy ion-assisted depositionJournal of Applied Physics, 1987
- Unbalanced magnetron ion-assisted deposition and property modification of thin filmsJournal of Vacuum Science & Technology A, 1986