Fibre optic sensor: Integration with micromachined devices
- 1 March 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 47 (1-3) , 463-469
- https://doi.org/10.1016/0924-4247(94)00942-b
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- In vivo biomedical monitoring by fiber optic systemsPublished by SPIE-Intl Soc Optical Eng ,1994
- Optical fibre-type current sensor utilizing the Faraday effect of the flint glass fibrePublished by SPIE-Intl Soc Optical Eng ,1994
- Digital optical interconnects for photonic computingPublished by SPIE-Intl Soc Optical Eng ,1994
- High-density integrated planar lightwave circuits using SiO/sub 2/-GeO/sub 2/ waveguides with a high refractive index differenceJournal of Lightwave Technology, 1994
- Micromachines on the marchIEEE Spectrum, 1994
- Fibre optic silicon impact sensor for application to smart skinsElectronics Letters, 1993
- Invited Paper Silicon In OpticsPublished by SPIE-Intl Soc Optical Eng ,1987
- Solid-state capacitive pressure transducersSensors and Actuators, 1986
- All-silicon active and passive guided-wave components for λ = 1.3 and 1.6 µmIEEE Journal of Quantum Electronics, 1986
- Silicon as a mechanical materialProceedings of the IEEE, 1982