Hardness versus structure in W–Si–N sputtered coatings
- 1 September 1999
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 116-119, 74-80
- https://doi.org/10.1016/s0257-8972(99)00277-7
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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