Aes and Xps Studies of Sulfur-Treated ALxGA1−xas Surfaces
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
Passivation of AlxGa1−xAs surfaces by ammonium sulfide treatment has been investigated. Enhancement of photoluminescence intensity and dramatic reduction of oxide peaks in spectra acquired by X-ray photoelectron spectroscopy on AlxGa1−x.As surfaces prepared by this treatment lead to the reduction of surface state density. It was found that sulfur atoms were mainly bonded to Al atoms in an Al-enriched specimen of AlxGa1−xAs(x=0.78). The surface compositions of Al-enriched specimen(x=0.43, 0.78) were also found to be As-rich as a result of both sulfur treatment and the preferential etching of metallic atoms by an acidic solution, which prevents the initial oxidation of the surface of A1xGa1−xAs.Keywords
This publication has 14 references indexed in Scilit:
- Studies on an (NH4)2Sx-Treated GaAs Surface Using AES, LEELS and RHEEDJapanese Journal of Applied Physics, 1989
- Surface passivation of GaAsApplied Physics Letters, 1989
- Electronic passivation of GaAs surfaces through the formation of arsenic—sulfur bondsApplied Physics Letters, 1989
- X-ray photoelectron spectroscopy of ammonium sulfide treated GaAs (100) surfacesApplied Physics Letters, 1989
- A Model to Explain the Effective Passivation of the GaAs Surface by (NH4)2Sx TreatmentJapanese Journal of Applied Physics, 1988
- The Effect of (NH4)2S Treatment on the Interface Characteristics of GaAs MIS StructuresJapanese Journal of Applied Physics, 1988
- Effects of Na2S and (NH4)2S edge passivation treatments on the dark current-voltage characteristics of GaAs p n diodesApplied Physics Letters, 1988
- Reduction of GaAs surface recombination velocity by chemical treatmentApplied Physics Letters, 1980
- The surface electronic structure of 3–5 compounds and the mechanism of Fermi level pinning by oxygen (passivation) and metals (Schottky barriers)Surface Science, 1979
- High-Resolution X-Ray Photoemission Spectrum of the Valence Bands of GoldPhysical Review B, 1972