A multiplexed silicon infrared thermal imager
- 1 January 1991
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A model for rapid thermal processing: achieving uniformity through lamp controlIEEE Transactions on Semiconductor Manufacturing, 1991
- Radiation thermometry of silicon wafers in a diffusion furnace for fabrication of LSIIEEE Transactions on Semiconductor Manufacturing, 1991
- Analysis of noise margin and speed of GaAs MESFET DCFL using UM-SPICEIEEE Transactions on Electron Devices, 1986