Direct fabrication of deep x-ray lithography masks by micromechanical milling
- 1 July 1998
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 22 (3) , 164-173
- https://doi.org/10.1016/s0141-6359(98)00012-9
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Deep etch X-ray lithography using silicon-gold masks fabricated by deep etch UV lithography and electroformingJournal of Micromechanics and Microengineering, 1995