Micrometer-scale machining: tool fabrication and initial results
- 1 October 1996
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 19 (2-3) , 180-186
- https://doi.org/10.1016/s0141-6359(96)00024-4
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Development of the micromilling process for high-aspect-ratio microstructuresJournal of Microelectromechanical Systems, 1996
- Published by American Vacuum Society ,1994
- Formation of probe microscope tips in silicon by focused ion beamsApplied Physics Letters, 1994
- Characterization of scanning probe microscope tips for linewidth measurementJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Scanning probe tip geometry optimized for metrology by focused ion beam ion millingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Scanning probe tips formed by focused ion beamsReview of Scientific Instruments, 1991
- Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)Microelectronic Engineering, 1986