Integrated hydrogen leak detector with a tunnel mis structure
- 30 April 1988
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 13 (4) , 315-321
- https://doi.org/10.1016/0250-6874(88)80044-1
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
This publication has 5 references indexed in Scilit:
- An integrated hydrogen-switching sensor with a Pd-Si tunnel mis structureSensors and Actuators, 1986
- Hydrogen-sensitive silicon tunnel MIS switching diodesIEEE Electron Device Letters, 1983
- Silicon p−n insulator-metal (p-n-I-M) devicesSolid-State Electronics, 1976
- A hydrogen−sensitive MOS field−effect transistorApplied Physics Letters, 1975
- Thin-MIS-Structure Si Negative-Resistance DiodeApplied Physics Letters, 1972