Ion beams in semiconductor physics and technology

This publication has 13 references indexed in Scilit:

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• Measurements of the accumulation of hydrogen at the silicon-silicon-dioxide interface using nuclear reaction analysis
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• The heavy-ion microprobe at GSI — Used for single ion micromechanics
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• Channeling analysis of strain in superlattices
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• The fabrication of high quality silicon junction detectors by low energy ion implantation
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