Considerations For Advanced Charging Solutions Applied to ULSI Device Fabrication
- 1 January 1993
- book chapter
- Published by Elsevier
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Computer modelling for ion-beam system designNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Ion beam system design for ULSI device requirementsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- New approaches to charging controlNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Control of surface charging during high current ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989