Computer modelling for ion-beam system design
- 1 April 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 55 (1-4) , 527-532
- https://doi.org/10.1016/0168-583x(91)96225-a
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Control of surface charging during high current ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Computers and the design of ion beam optical systemsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Wafer charging and beam interactions in ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Theoretical and experimental study of space charge in intense ion beamsPhysical Review A, 1979
- First- and Second-Order Magnetic Optics Matrix Equations for the Midplane of Uniform-Field Wedge MagnetsReview of Scientific Instruments, 1964
- Effect of Extended Fringing Fields on Ion-Focusing Properties of Deflecting MagnetsReview of Scientific Instruments, 1964