Preparation and properties of amorphous hydrogenated a-Si1−xCx:H coatings deposited by RF plasma-enhanced CVD
- 15 April 1992
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 1 (5-6) , 553-557
- https://doi.org/10.1016/0925-9635(92)90164-j
Abstract
No abstract availableKeywords
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