PREPARATION, PROPERTIES AND STRUCTURE OF METAL CONTAINING AMORPHOUS HYDROGENATED CARBON FILMS
- 1 July 1993
- journal article
- research article
- Published by Taylor & Francis in Materials and Manufacturing Processes
- Vol. 8 (4-5) , 407-417
- https://doi.org/10.1080/10426919308934846
Abstract
Amorphous hydrogenated carbon (a-C:H) films and hydrocarbon films containing transition metals (Me-C:H) were prepared by glow discharge and reactive sputtering techniques at relatively low substrate temperatures (100 - 200°C). The tribological properties of both these types of coating materials will be compared. For steel counterparts Me-C:H films show very low friction coefficients (0·15 > μ > 0·05), depending on the used metal as well as on the metal content. The a-C:H films are more wear resistant but their friction coefficients are slightly higher. Measurements of microhardness and elastic modulus by a nanometer-indentation technique could not reveal a comprehensive understanding of the excellent tribological properties of the Me-C:H films.The experimental results of analytical investigations by photoelectron spectroscopy and X-ray diffraction can be explained by a structure model consisting of a homogeneous mixture of amorphous carbon (a-C:H) and metal carbides. A shell of modified a-C:H material around the carbide crystallites seem to affect the physical properties of the filmsKeywords
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