Surface morphologies associated with thermal desorption: Scanning tunneling microscopy studies of Br–GaAs(110)
- 1 May 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 15 (3) , 605-609
- https://doi.org/10.1116/1.589300
Abstract
Scanning tunneling microscopy was used to characterize the developing surface morphology found during typical temperature programmed desorption experiments for halogen–GaAs. Surfaces exposed to Br2 at 300 K were heated to temperatures between 450 and 675 K, followed by scanning at room temperature. This made it possible to relate the temperature-dependent gas phase etch product distribution to the surface structure and thereby examine atomic-level surface processes associated with the evolution of volatile products. We associate the desorption of GaBr3 around 500 K with the initiation of single-layer-deep terrace pits. Desorption of GaBr and As2 above 600 K accounts for the lateral enlargement of the pits.This publication has 12 references indexed in Scilit:
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