Low voltage tunable barium strontium titanate thin film capacitors for RF and microwave applications
- 7 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 3, 1345-1348 vol.3
- https://doi.org/10.1109/mwsym.2000.861790
Abstract
In this paper, we report on the fabrication and testing of thin film barium strontium titanate (BST) based capacitors for RF and microwave components. At 7 V DC applied, MOCVD BST parallel plate capacitors yielded 60% (2.4:1) tunability between 45 MHz and 200 MHz. In this frequency range, the dielectric loss tangent was typically 0.004. Measured results for the frequency dependent dielectric permittivity and tunability at large RF voltage amplitudes are presented.Keywords
This publication has 11 references indexed in Scilit:
- BaSrTiO/sub 3/ thin films for integrated high frequency capacitorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Dielectric response of ferroelectric filmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- High-Q SOI gate varactor for use in RF ICsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Ferroelectricity in thin films: The dielectric response of fiber-textured (BaxSr1−x)Ti1+yO3+z thin films grown by chemical vapor depositionJournal of Applied Physics, 1999
- Structure/property relationships in ferroelectric thin films for frequency agile microwave electronicsIntegrated Ferroelectrics, 1998
- The Effect of (Ba,Sr) and (Mn,Fe,W) Dopants on the Microwave Properties of BaxSr1−xTiO3 Thin FilmsMRS Proceedings, 1998
- Planar microwave integrated phase-shifter design with high purity ferroelectric materialIEEE Transactions on Microwave Theory and Techniques, 1997
- High-Permittivity Perovskite Thin Films for Dynamic Random-Access MemoriesMRS Bulletin, 1996
- High frequency dielectric properties of thin-film PZT capacitorsIntegrated Ferroelectrics, 1995
- HTS/ferroelectric thin films for tunable microwave componentsIEEE Transactions on Applied Superconductivity, 1995