TiN layer synthesis by laser-plasma
- 1 April 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 241 (1-2) , 39-43
- https://doi.org/10.1016/0040-6090(94)90392-1
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Multistage plasma initiation process by pulsed CO2 laser irradiation of a Ti sample in an ambient gas (He, Ar, or N2)Journal of Applied Physics, 1993
- Photoemission study of low pressure chemical vapor deposited and reactively sputtered titanium nitride in W/TiN/SiJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- XPS analysis of adsorption of oxygen molecules on the surface of Ti and TiNx films in vacuumJournal of Electron Spectroscopy and Related Phenomena, 1992
- Low temperature oxidation behavior of reactively sputtered TiN by x‐ray photoelectron spectroscopy and contact resistance measurementsJournal of Vacuum Science & Technology A, 1986
- Experimental study of igition and propagation of laser-supported detonation wavesJournal of Applied Physics, 1974