The first valve-less diffuser gas pump
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- An improved valve-less pump fabricated using deep reactive ion etchingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micropump manufactured by thermoplastic moldingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A valve-less planar fluid pump with two pump chambersSensors and Actuators A: Physical, 1995
- LIGA micropump for gases and liquidsSensors and Actuators A: Physical, 1994
- A valveless diffuser/nozzle-based fluid pumpSensors and Actuators A: Physical, 1993