An improved valve-less pump fabricated using deep reactive ion etching
- 23 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Silicon Fusion Bonding and Deep Reactive Ion Etching a New Technology for MicrostructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Fluid micropumps based on rotary magnetic actuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A valve-less planar pump isotropically etched in siliconJournal of Micromechanics and Microengineering, 1996
- A valve-less planar fluid pump with two pump chambersSensors and Actuators A: Physical, 1995
- A bidirectional silicon micropumpPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1995
- Microfluidics-a reviewJournal of Micromechanics and Microengineering, 1993
- A valveless diffuser/nozzle-based fluid pumpSensors and Actuators A: Physical, 1993
- A micromachined electrohydrodynamic (EHD) pumpSensors and Actuators A: Physical, 1991
- Piezoelectric micropump with three valves working peristalticallySensors and Actuators A: Physical, 1990
- A thermopneumatic micropump based on micro-engineering techniquesSensors and Actuators A: Physical, 1990