Observation of microdiffraction patterns with a dedicated STEM instrument

Abstract
A two‐dimensional detector system, designed for the observation and recording of microdiffraction patterns formed in an HB 5 scanning transmission electron microscope (STEM) is described and discussed. Possibilities are described and demonstrated for the simultaneous or successive recording of microdiffraction patterns from regions of diameter 3 å or more, bright‐ or dark‐field STEM images, EELS spectra, secondary electron images, and in‐line holograms. Applications of the system have been made to studies of catalyst particles, reflection‐mode imaging of bulk surfaces, and image reconstruction from microdiffraction patterns obtained from each point of a STEM image.

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