Structural Characterization of AlP/GaP Disordered Superlattice by Dynamical Simulation of X-Ray Diffraction

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Abstract
Dynamical simulation of X-ray diffraction is used to characterize structural properties of (AlP) m /(GaP) n (m, n=h, k, l) disordered superlattices (d-SLs). Many small diffraction peaks appear around the main peak, and peak intensities become weaker as the deviation from the average thickness increases. The observed diffraction patterns can be interpreted if the repetition of random series in the superlattice is taken into account. It is found that the total number of monolayers (MLs) of the 6 constituent layers or the average number of MLs of a d-SL can be precisely determined from the smallest peak separation or the angular distance between the main peak and the 0th-order diffraction peak.