Reactions of atomic hydrogen in the deposition of hydrogenated amorphous silicon by glow discharge and reactive sputtering
- 1 September 1982
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 53 (9) , 6408-6412
- https://doi.org/10.1063/1.331513
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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