Optical properties of PECVD dielectric thin films: thickness and deposition method dependence
- 30 November 2002
- journal article
- Published by Elsevier in Microelectronics Journal
- Vol. 33 (11) , 999-1004
- https://doi.org/10.1016/s0026-2692(02)00065-4
Abstract
No abstract availableKeywords
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