Inductive plasma sources for plasma implantation and deposition
- 1 January 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 26 (6) , 1653-1660
- https://doi.org/10.1109/27.747883
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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