Nitrogen incorporation during 4H-SiC epitaxy in a chimney CVD reactor
- 1 June 2001
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 226 (2-3) , 267-276
- https://doi.org/10.1016/s0022-0248(01)01369-0
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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