Decomposition mechanisms of thin palladium acetate film with excimer UV radiation
- 1 April 1996
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 96-98, 399-404
- https://doi.org/10.1016/0169-4332(95)00493-9
Abstract
No abstract availableKeywords
This publication has 24 references indexed in Scilit:
- The photoinduced metallo-organic decomposition process: a novel technique for dielectric thin-film growthIEEE Electron Device Letters, 1992
- Effect of surfactant on casting metalorganic films and writing copper metal patternsJournal of Materials Research, 1991
- Laser-induced selective copper deposition on polyimideApplied Physics Letters, 1988
- Direct Writing of Copper Film Patterns by Laser‐Induced Decomposition of Copper AcetateJournal of the Electrochemical Society, 1988
- Laser writing of copper lines from metalorganic filmsApplied Physics Letters, 1987
- Laser Decomposition of Platinum Metallo‐Organic Films for Electroless Copper PlatingJournal of the Electrochemical Society, 1987
- Laser direct-write metallization in thin palladium acetate filmsJournal of Applied Physics, 1987
- Laser-initiated deposition reactions: Microchemistry in organogold polymer filmsApplied Physics Letters, 1985
- Copper conductors by reduction of copper (I) complex in a host polymerApplied Physics Letters, 1985
- Laser-initiated microchemistry in thin films: Development of new types of periodic structureJournal of Applied Physics, 1985