Two original pieces of apparatus for the preparation of coatings using dynamic ion beam mixing: First applications
- 30 April 1989
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 37 (2) , 225-235
- https://doi.org/10.1016/0257-8972(89)90105-9
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Tribological behaviour of some alloys after surface modification using ion beam techniquesSurface and Coatings Technology, 1987
- Thick and homogeneous surface layers obtained by reactive ion-beam-enhanced depositionMaterials Science and Engineering, 1987
- Surface treatment of aluminum alloy at room temperature with titanium-nitride films by dynamic mixingNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- A review of the present state of art in hard coatings grown from the vapor phaseJournal of Vacuum Science & Technology A, 1986
- R.F. reactive sputter deposition of hydrogenated amorphous silicon carbide filmsThin Solid Films, 1986
- Adherent TiN films produced by ion beam enhanced deposition at room temperatureNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Technology and applications of broad-beam ion sources used in sputtering. Part I. Ion source technologyJournal of Vacuum Science and Technology, 1982
- A medium energy facility for variable temperature implantation and analysisNuclear Instruments and Methods in Physics Research, 1981