Undistorted measurements of differential sputtering yields using the collector method by means of electron backscattering
- 1 March 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 2 (1-3) , 649-654
- https://doi.org/10.1016/0168-583x(84)90285-4
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Electron backscattering from thin filmsJournal of Applied Physics, 1982
- A penning type ion source with high efficiency and some applicationsRadiation Effects, 1982
- Relations between the orientations of ion bombarded single crystals, resulting surface structures and sputtered spot patternsRadiation Effects, 1981
- Distortion of sputtering spot patterns of single crystals due to incomplete condensationRadiation Effects, 1974