X-ray double crystal and X-ray topographic characterization of silicon carbide thin films on silicon, titanium carbide, 6H-silicon carbide, and aluminum nitride/sapphire substrates
- 1 March 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 274 (1-2) , 23-30
- https://doi.org/10.1016/0040-6090(95)07087-7
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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