A 2.2 GHz SAW Delay Line Fabricated by Direct Optical Projection
- 1 July 1979
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Sonics and Ultrasonics
- Vol. 26 (4) , 312
- https://doi.org/10.1109/t-su.1979.31106
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Sub-Micron IDT FabricationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1977
- Optimum cut for rotated Y-cut LiNbO3crystal used as the substrate of acoustic-surface-wave filtersProceedings of the IEEE, 1976
- Fabrication techniques for surface-acoustic-wave and thin-film optical devicesProceedings of the IEEE, 1974
- Projection Masking, Thin Photoresist Layers and Interference EffectsIBM Journal of Research and Development, 1970
- 1.75-GHz ACOUSTIC-SURFACE-WAVE TRANSDUCER FABRICATED BY AN ELECTRON BEAMApplied Physics Letters, 1969