Thermal conductivity of thick meso-porous silicon layers by micro-Raman scattering
- 15 December 1999
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 86 (12) , 6841-6846
- https://doi.org/10.1063/1.371760
Abstract
We report here a theoretical model describing specific mechanisms of heat transport in as-prepared and oxidized meso-porous silicon layers. The model is in good agreement with experimental measurements performed by micro-Raman scattering on the layers surface. For the first time, thermal conductivity inhomogeneity along the porous layer thickness of 100 μm is studied. Direct correlation between the thermal conductivity and morphology variations along the layer thickness is brought to the fore. A new approach to estimate local porosity of the porous layers based on thermal conductivity and Si nanocrystallite size measurements is also proposed.This publication has 19 references indexed in Scilit:
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