Sputtering by light-ion bombardment

This publication has 9 references indexed in Scilit:

• Theory of collisional sputtering
  Surface Science, 1987
• Ejection process in collisional sputtering
  Physical Review B, 1986
• Energy spectra of atoms sputtered by KeV light-ion bombardment
  Applied Physics A, 1983
• Depth of origin of sputtered atoms
  Applied Physics A, 1981
• Plasma-surface interactions in tokamaks
  Nuclear Fusion, 1979
• The sputtering mechanism for low-energy light ions
  Applied Physics A, 1979
• Contributions of backscattered ions to sputtering yields depending on primary ion energy
  Radiation Effects, 1973
• Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
  Physical Review B, 1969
• II. The energy spectrum of ejected atoms during the high energy sputtering of gold
  Philosophical Magazine, 1968