Theory of collisional sputtering
- 2 August 1987
- journal article
- Published by Elsevier in Surface Science
- Vol. 187 (1) , 212-222
- https://doi.org/10.1016/s0039-6028(87)80133-4
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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- II. The energy spectrum of ejected atoms during the high energy sputtering of goldPhilosophical Magazine, 1968
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