Unified theory of collisional sputtering
- 1 January 1984
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 85 (2) , 75-80
- https://doi.org/10.1080/01422448408209682
Abstract
It is shown that previos theories, for collisional sputtering of random solids, can be included in a unified formulation. The formulation, when it is extended to the near-threshold regime predicts, for oblique incidence and equal masses, threshold energies of the order of 2. 04 U, where U is a planar surface potential barrier. Some characteristic aspects of the yield expressions are also discussed.Keywords
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