Ion beam induced amorphous–crystalline phase transition in Si: Quantitative approach
- 1 July 2000
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 168 (3) , 375-388
- https://doi.org/10.1016/s0168-583x(99)01095-2
Abstract
No abstract availableThis publication has 44 references indexed in Scilit:
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