Determination of hydrogen in 6H–SiC epitaxial layers by the 15N nuclear reaction analysis technique
- 1 July 1999
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 155 (1-2) , 132-136
- https://doi.org/10.1016/s0168-583x(99)00250-5
Abstract
No abstract availableKeywords
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