Strain-energy-driven abnormal grain growth in copper films on silicon substrates
- 1 June 2001
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 226 (1) , 168-174
- https://doi.org/10.1016/s0022-0248(01)01376-8
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Thin Film Microstructure Control Using Glancing Angle Deposition by SputteringJournal of Materials Research, 1999
- Relationship of crystallographic orientation and impurities to stress, resistivity, and morphology for sputtered copper filmsJournal of Vacuum Science & Technology A, 1993
- Abnormal grain growth in aluminum alloy thin filmsJournal of Applied Physics, 1991
- The effects of dopants on surface-energy-driven secondary grain growth in silicon filmsJournal of Applied Physics, 1990
- Room-temperature copper metallization for ultralarge-scale integrated circuits by a low kinetic-energy particle processApplied Physics Letters, 1988
- Grain growth and grain size distributions in thin germanium filmsJournal of Applied Physics, 1987
- Surface-energy-driven secondary grain growth in thin Au filmsApplied Physics Letters, 1986
- Surface-energy-driven secondary grain growth in ultrathin (<100 nm) films of siliconApplied Physics Letters, 1984
- Anomalous large grains in alloyed aluminum thin films I. Secondary grain growth in aluminum-copper filmsThin Solid Films, 1972
- Theory of Thermal GroovingJournal of Applied Physics, 1957