3D-microstructure replication processes using UV-curable acrylates
- 1 August 2002
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 65 (1-2) , 163-170
- https://doi.org/10.1016/s0167-9317(02)00848-1
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Radical formation in electron-irradiated acrylates studied by pulse radiolysis and electron paramagnetic resonanceMacromolecular Chemistry and Physics, 2000
- Replication of 3D-micro- and nanostructures using different UV-curable polymersMicroelectronic Engineering, 2000
- The deposition of anti-adhesive ultra-thin teflon-like films and their interaction with polymers during hot embossingApplied Surface Science, 1999
- Excimer laser micromachining and replication of 3D optical surfacesApplied Surface Science, 1998
- Elimination of post-release adhesion in microstructures using conformal fluorocarbon coatingsJournal of Microelectromechanical Systems, 1997
- New large area ultraviolet lamp sources and their applicationsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997
- Nanoimprint lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Mold-assisted nanolithography: A process for reliable pattern replicationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Silanization of Solid Substrates: A Step Toward ReproducibilityLangmuir, 1994
- Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘‘ink’’ followed by chemical etchingApplied Physics Letters, 1993